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Etch and deposition

The deposition/etch cycle in depth — real Tier-2 physics (Arrhenius reaction kinetics vs. transport-limited delivery, plasma etch rate) — plus the mature-node variant and the metrology step that confirms the result.

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Deposition / Etch Cycle

1.Deposition / Etch CycleHsinchu2.Mature-Node DepositionTexas3.In-line Metrology & Defect InspectionKumamoto