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SiliconSim

Front-end fabrication

Every front-end step across all three fab sites, including the memory (DRAM) and analog/power process variants alongside the leading-edge logic flow.

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Wafer Cleaning & Oxidation

1.Wafer Cleaning & OxidationKumamoto 2.Photoresist Coat & ExposeTokyo 3.EUV/DUV Lithography ExposureArizona 4.Resist DevelopHsinchu 5.Deposition / Etch CycleHsinchu 6.Ion Implant & CMPArizona 7.Rapid Thermal AnnealArizona 8.Copper Interconnect (Damascene)Hsinchu 9.DRAM Capacitor FormationIncheon 10.Mature-Node DepositionTexas 11.In-line Metrology & Defect InspectionKumamoto